Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope
- Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope
- 현찬경; 최승철; 황성우; 안도열; 김용; 김은규
- nano-structure; AFM; scanning probe lithography; cantilever oscillation; voltage modulation
- Issue Date
- Japanese Journal of Applied Physics, Part 1- Regular Papers
- VOL 38, NO 12B, 7257-7259
- Appears in Collections:
- KIST Publication > Article
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