Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Title
Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope
Authors
현찬경최승철황성우안도열김용김은규
Keywords
nano-structure; AFM; scanning probe lithography; cantilever oscillation; voltage modulation
Issue Date
1999-12
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 38, NO 12B, 7257-7259
URI
http://pubs.kist.re.kr/handle/201004/18174
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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