The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation

Title
The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation
Authors
조정희한승희이연희김옥경김곤호김영우임현의서무진
Keywords
quadrupole mass analyzer
Issue Date
1999-12
Publisher
Fifth International Workshop on Plasma-Based Ion Implantation
Citation
-34
URI
http://pubs.kist.re.kr/handle/201004/18188
Appears in Collections:
KIST Publication > Conference Paper
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