Thermodynamic theory of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films

Title
Thermodynamic theory of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films
Authors
김형준오성훈장현명
Keywords
thin film; stress; PZT; Thermodynami
Issue Date
1999-11
Publisher
Applied physics letters
Citation
VOL 75, NO 20, 3195-3197
URI
http://pubs.kist.re.kr/handle/201004/18221
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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