Fabrication of MEMS based n-polysilicon strain sensor

Title
Fabrication of MEMS based n-polysilicon strain sensor
Authors
김태송정형진
Issue Date
1999-11
Publisher
1999년도 한국센서학회 논문집
Citation
VOL 10, NO 1, 77-80
URI
http://pubs.kist.re.kr/handle/201004/18265
ISSN
1225-3278
Appears in Collections:
KIST Publication > Conference Paper
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