A comparative study for the characteristics of VOx thin films fabricated by thermal oxidation and sputtering methods

Title
A comparative study for the characteristics of VOx thin films fabricated by thermal oxidation and sputtering methods
Authors
박철우김민철강호관문성욱오명환정홍배
Keywords
열산화법; sputtering법; 산화 바나듐; 박막; 특성비교; sputtering; oxidation; TCR
Issue Date
1999-11
Publisher
센서학회지
Citation
VOL 10, NO 1, 363-367
URI
http://pubs.kist.re.kr/handle/201004/18270
Appears in Collections:
KIST Publication > Conference Paper
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