A self-ion assisted beam (SIAB) source based upon Unvala electron beam scheme

Title
A self-ion assisted beam (SIAB) source based upon Unvala electron beam scheme
Authors
최원국송재훈김기한최성창이충만송종한정형진
Keywords
self-ion assisted beam (SIAB); Cu film; unvala scheme; electron beam source; ionization efficiency; resistivity
Issue Date
1999-11
Publisher
Thin solid films
Citation
VOL 354, 29-33
URI
http://pubs.kist.re.kr/handle/201004/18289
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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