Fabrication of high-yield Si micro-diaphragms using electrochemical etch-stop in TMAH/IPA/pyrazine solution

Title
Fabrication of high-yield Si micro-diaphragms using electrochemical etch-stop in TMAH/IPA/pyrazine solution
Authors
정귀상박진성주병권
Keywords
anisotropic etching; TMAH/IPA/pyrazine solution; electrochemical etch-stop; OCP; PP; micro-diaphgarm
Issue Date
1999-01
Publisher
Conference on Device and Process Technologies for MEMS and Microelectronics
Citation
VOL 3892 (SPIE), 346-355
URI
http://pubs.kist.re.kr/handle/201004/18348
Appears in Collections:
KIST Publication > Conference Paper
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