A study on laser direct dry etching of GaAs/AlGaAs multi-layer.

Title
A study on laser direct dry etching of GaAs/AlGaAs multi-layer.
Authors
박세기이천김은규
Keywords
Ar ion laser
Issue Date
1999-01
Publisher
Proc. SPIE's Conf. on laser Application in Micro-electronic and Optoelectronic Manufacturing IV
Citation
v. 3618, 370-377
URI
http://pubs.kist.re.kr/handle/201004/18412
Appears in Collections:
KIST Publication > Conference Paper
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