Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices
- Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices
- 주병권; 정재훈; 김훈; 이윤희; 이남양; 오명환
- FED; field emission; Mo-tip FEA; DLC coating; N-doping; low-hydrogenated film; transconductance; electrical conductivity; optical band-gap
- Issue Date
- 전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
- VOL 48C, NO 1, 18-22
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- KIST Publication > Article
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