Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices

Title
Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices
Authors
주병권정재훈김훈이윤희이남양오명환
Keywords
FED; field emission; Mo-tip FEA; DLC coating; N-doping; low-hydrogenated film; transconductance; electrical conductivity; optical band-gap
Issue Date
1999-01
Publisher
전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 48C, NO 1, 18-22
URI
http://pubs.kist.re.kr/handle/201004/18423
ISSN
0254-4172
Appears in Collections:
KIST Publication > Article
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