Phase transformation and morphological evolution of ion-beam sputtered tin oxide films on silicon substrate

Title
Phase transformation and morphological evolution of ion-beam sputtered tin oxide films on silicon substrate
Authors
최용삼장재호김대승김긍호백홍구
Keywords
oxides; thin films; X-ray diffraction; phase transitions
Issue Date
1999-01
Publisher
Materials research bulletin
Citation
VOL 34, NO 9, 1473-1479
URI
http://pubs.kist.re.kr/handle/201004/18491
ISSN
0025-5408
Appears in Collections:
KIST Publication > Article
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