Measurement of elastic properties of diamond-like carbon films using a simple micro-fabrication

Title
Measurement of elastic properties of diamond-like carbon films using a simple micro-fabrication
Authors
조성진정진원이광렬은광용한준희김영만
Keywords
thin films; elastic properties; micro-fabrication
Issue Date
1999-01
Publisher
Proc. Applied Diamond Conference 99
Citation
, 602-608
URI
http://pubs.kist.re.kr/handle/201004/18521
Appears in Collections:
KIST Publication > Conference Paper
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