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dc.contributor.author조성진-
dc.contributor.author정진원-
dc.contributor.author이광렬-
dc.contributor.author은광용-
dc.contributor.author한준희-
dc.contributor.author김영만-
dc.date.accessioned2015-12-02T05:39:42Z-
dc.date.available2015-12-02T05:39:42Z-
dc.date.issued199901-
dc.identifier.citation, 602-608-
dc.identifier.other10002-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/18521-
dc.publisherProc. Applied Diamond Conference 99-
dc.subjectthin films-
dc.subjectelastic properties-
dc.subjectmicro-fabrication-
dc.titleMeasurement of elastic properties of diamond-like carbon films using a simple micro-fabrication-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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