Ceramic surface modification by a keV ion irradiation

Title
Ceramic surface modification by a keV ion irradiation
Authors
최원국최성창정형진고석근
Keywords
keV ion beam; reactive ion irradiation; ceramic surface; surface functional group; ceramic surface modification; functional layer; metal film adhesion
Issue Date
1999-01
Publisher
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
Citation
VOL 148, 740-744
URI
http://pubs.kist.re.kr/handle/201004/18548
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
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