Ceramic surface modification by a keV ion irradiation
- Ceramic surface modification by a keV ion irradiation
- 최원국; 최성창; 정형진; 고석근
- keV ion beam; reactive ion irradiation; ceramic surface; surface functional group; ceramic surface modification; functional layer; metal film adhesion
- Issue Date
- Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
- VOL 148, 740-744
- Appears in Collections:
- KIST Publication > Article
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