Determination of elastic modulus and Poisson's ratio of diamond-like carbon films

Title
Determination of elastic modulus and Poisson's ratio of diamond-like carbon films
Authors
조성진이광렬은광용한준희고대홍
Keywords
diamond-like carbon; thin films; elastic properties; poisson's ratio; PACVD
Issue Date
1999-01
Publisher
Thin solid films
Citation
VOL 341, 207-210
URI
http://pubs.kist.re.kr/handle/201004/18567
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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