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dc.contributor.author윤진국-
dc.contributor.author윤호상-
dc.contributor.author김희수-
dc.contributor.author백영현-
dc.contributor.author김재수-
dc.date.accessioned2015-12-02T05:41:01Z-
dc.date.available2015-12-02T05:41:01Z-
dc.date.issued199809-
dc.identifier.citationVOL 36, NO 9, 1461-1469-
dc.identifier.other9684-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/18659-
dc.publisher대한금속학회지-
dc.subjectkinetics-
dc.titleEffects of Cl/H input ratio on the chemical vapor deposition rate of silicon on molybdenum substrate-
dc.typeArticle-
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