The sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas
- The sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas
- 조정; 조준식; 윤기현; 김현주; 최원국; 정형진; 고석근
- SnO2 thin film; reactive ion-assisted deposition; ultra-thin Pd layer; Ion beam sputtering; spill-over
- Issue Date
- 한국세라믹학회지; Journal of the Korean Ceramic Society
- VOL 35, NO 8, 795-800
- Appears in Collections:
- KIST Publication > Article
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