The sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas

Title
The sensitivity of ultra thin pd-doped SnO2 gas sensor fabricated by ion-assisted deposition for methane gas
Authors
조정조준식윤기현김현주최원국정형진고석근
Keywords
SnO2 thin film; reactive ion-assisted deposition; ultra-thin Pd layer; Ion beam sputtering; spill-over
Issue Date
1998-08
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 35, NO 8, 795-800
URI
http://pubs.kist.re.kr/handle/201004/18701
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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