초소형 정밀기계의 소개 및 국내외 기술동향

Title
초소형 정밀기계의 소개 및 국내외 기술동향
Authors
백경갑주병권김희중오명환
Keywords
MEMS
Issue Date
1998-08
Publisher
전자부품; The Electronic Parts & Components Monthly
Citation
, 158-166
URI
http://pubs.kist.re.kr/handle/201004/18702
Appears in Collections:
KIST Publication > ETC
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