A study on the chemical vapor deposition of Si on Mo substrate

Title
A study on the chemical vapor deposition of Si on Mo substrate
Authors
윤진국정병성고흥석김재수최종술
Keywords
molybdenum
Issue Date
1998-07
Publisher
대한금속학회지
Citation
v. 36, no. 7, 1123-1130
URI
http://pubs.kist.re.kr/handle/201004/18710
Appears in Collections:
KIST Publication > Article
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