Etching-bonding-thin film deposition process for MEMS-IR SENSOR application

Title
Etching-bonding-thin film deposition process for MEMS-IR SENSOR application
Authors
박윤권주병권박흥우박정호염상섭서상희오명환김철주
Keywords
MEMS
Issue Date
1998-07
Publisher
대한전기학회 하계학술대회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/18713
Appears in Collections:
KIST Publication > Conference Paper
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