Electrical properties of e-beam exposed silicon dioxides and their application to nano-devices

Title
Electrical properties of e-beam exposed silicon dioxides and their application to nano-devices
Authors
최범호정석구김석일황성우박정호김용김은규민석기
Keywords
electrial property; E-beam; silicon dioxide; nano-device
Issue Date
1998-07
Publisher
Digest of Papers on Microprocesses and Nanotechnology '98
Citation
, 206-207
URI
http://pubs.kist.re.kr/handle/201004/18750
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE