Si micromachining for MEMS-IR sensor application

Title
Si micromachining for MEMS-IR sensor application
Authors
박흥우주병권박윤권박정호김철주염상섭서상희오명환
Keywords
MEMS
Issue Date
1998-06
Publisher
한국전기전자재료학회 춘계학술대회 논문집; Proceedings of the Spring Symposium of KIEEME
Citation
, 411-414
URI
http://pubs.kist.re.kr/handle/201004/18784
Appears in Collections:
KIST Publication > Conference Paper
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