Vacuum sealing of field-emission arrays using field-assisted bonding method

Title
Vacuum sealing of field-emission arrays using field-assisted bonding method
Authors
이덕중주병권이윤희오명환이남양한정인조경익장진
Keywords
MEMS
Issue Date
1998-05
Publisher
Proc. SID '98
Citation
, 589-592
URI
http://pubs.kist.re.kr/handle/201004/18795
ISSN
0098-0966
Appears in Collections:
KIST Publication > Conference Paper
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