Metallization of Cu on polytetrafluoroethylene modified by keV Ar1 ion irradiation

Title
Metallization of Cu on polytetrafluoroethylene modified by keV Ar1 ion irradiation
Authors
조준식최원국고석근윤기현
Keywords
polytetrafluoroethylene
Issue Date
1998-05
Publisher
Journal of Vacuum Science and Technology B
Citation
VOL 16, NO 3, 1110-1114
Abstract
A surface of polytetrafluoroethylene (PTFE) was modified with changing ion doses by 1 keVAr + ion irradiation and Cufilms with a 5000 Å were deposited on the modified PTFE. The scanning electron microscopy study showed that the surface texture of modified PTFE was in the form of filaments whose height increased depending on ion doses. Through x-ray photoelectron spectroscopy spectra, it was found that the intensity ofF 1s peaks decreased with ion doses by preferential sputtering of F atoms and the C–C and/or C–F chains were formed by the crosslinking in the newly unstable chains. Cufilms were deposited uniformly along the filaments formed on the modified PTFE. In x-ray diffraction spectra of depositedCufilms on modified PTFE, a preferred orientation along (111) and (200) planes was found and a relative intensity of(111)/(200) orientation increased as surface roughness of modified PTFE increased. The resistivity of Cufilms was changed from 2.7 μΩ cm of unmodified PTFE to 4.3 μΩ cm of modified PTFE at an ion dose of1×10 16 /cm 2 and the abrupt increase of resistivity in the modified PTFE at an ion dose of1×10 17 /cm 2 was due to being cut off the film which resulted from the increased surface roughness.
URI
http://pubs.kist.re.kr/handle/201004/18813
ISSN
1071-1023
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KIST Publication > Article
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