Selective epitaxy of carbon-tetrachloride-doped GaAs grown by metalorganic chemical vapor deposition

Title
Selective epitaxy of carbon-tetrachloride-doped GaAs grown by metalorganic chemical vapor deposition
Authors
박영균김성일김용김은규민석기손창식최인훈
Keywords
Selective Epitaxy
Issue Date
1998-05
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, NO 5, 704-706
URI
http://pubs.kist.re.kr/handle/201004/18826
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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