Electrostatic bonding between Si and ITO-coated #7059 glass substrates

Title
Electrostatic bonding between Si and ITO-coated #7059 glass substrates
Authors
주병권정회환김영조한정인조경익오명환
Keywords
MEMS
Issue Date
1998-05
Publisher
센서학회지
Citation
VOL 7, NO 3, 211-218
URI
http://pubs.kist.re.kr/handle/201004/18836
ISSN
1225-5475
Appears in Collections:
KIST Publication > Article
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