Enhanced relaxation of strain in BF//2**+ implanted Ge//0//.//0//6Si//0//.//9//4

Title
Enhanced relaxation of strain in BF//2**+ implanted Ge//0//.//0//6Si//0//.//9//4
Authors
S. Im*M. S. Oh김효배송종한
Keywords
키워드
Issue Date
1998-04
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 2, NO 1, 37-42
URI
http://pubs.kist.re.kr/handle/201004/18855
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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