Large size plasma generation using multicathode direct current geometry for diamond deposition

Title
Large size plasma generation using multicathode direct current geometry for diamond deposition
Authors
백영준이재갑이욱성은광용
Keywords
diamond
Issue Date
1998-04
Publisher
Journal of materials research
Citation
VOL 13, NO 4, 944-946
URI
http://pubs.kist.re.kr/handle/201004/18859
ISSN
0884-2914
Appears in Collections:
KIST Publication > Article
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