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dc.contributor.author김동준-
dc.contributor.author김용태-
dc.contributor.author박종완-
dc.date.accessioned2015-12-02T05:43:37Z-
dc.date.available2015-12-02T05:43:37Z-
dc.date.issued199804-
dc.identifier.citation, ?-?-
dc.identifier.other9187-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/18867-
dc.publisherMRS 98'-
dc.subjectAmorphous-
dc.titleEffects of boron on diffusion barrier characteristics of PECVD W-B-N films-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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