유기금속 화합물을 이용한 AlN의 제조

Title
유기금속 화합물을 이용한 AlN의 제조
Authors
조성훈안홍상신경섭경제홍최승철한성환
Keywords
CVD; AIN
Issue Date
1998-04
Publisher
대한화학회발표 (춘계)
Citation
, 166-166
URI
http://pubs.kist.re.kr/handle/201004/18879
Appears in Collections:
KIST Publication > Conference Paper
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