Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB)

Title
Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB)
Authors
Steven R. SakamotoCem Ozturk변영태Jack KoNadir Dagli
Keywords
SUR optical waveguides; benzocyclobutene; Gats substrate set spray etch; propagation loss
Issue Date
1998-03
Publisher
Integrated Photonics Research 1998 : Technical Digest Series
Citation
VOL 4, 79-81
URI
http://pubs.kist.re.kr/handle/201004/18908
Appears in Collections:
KIST Publication > Conference Paper
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