Reactive ion etching of Pt thin films for fabrication of microcapacitor

Title
Reactive ion etching of Pt thin films for fabrication of microcapacitor
Authors
김권석이종명신주철이전국김형준
Keywords
Pt thin film; microcapacitor; reactive ion etching
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1532-S1534
URI
http://pubs.kist.re.kr/handle/201004/18927
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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