Resistless nanometer patterning of SiO₂ with electron beam irradiation

Title
Resistless nanometer patterning of SiO₂ with electron beam irradiation
Authors
김석일정석구최범호현찬경김은규민석기황성우
Keywords
Resitless nanometer patterning of SiO ₂ with electron beam irradiation
Issue Date
1998-02
Publisher
제 5 회 한국반도체학술대회
Citation
, 585-586
URI
http://pubs.kist.re.kr/handle/201004/18928
Appears in Collections:
KIST Publication > Conference Paper
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