마이크로 IR 센서용 PbTiO//3 박막 및 구조물 제작

Title
마이크로 IR 센서용 PbTiO//3 박막 및 구조물 제작
Authors
염상섭박재석주병권최현석오영재정문교서상희
Keywords
MEMS
Issue Date
1998-02
Publisher
제 7 회 유전체 물성 심포지움
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/18949
Appears in Collections:
KIST Publication > Conference Paper
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