실리콘과 유리접합을 이용한 FED Packaging

Title
실리콘과 유리접합을 이용한 FED Packaging
Authors
정지원주병권최우범이덕중최두진오명환
Keywords
MEMS
Issue Date
1998-02
Publisher
제5회 한국반도체학술대회 논문집
Citation
, 207-208
URI
http://pubs.kist.re.kr/handle/201004/18950
Appears in Collections:
KIST Publication > Conference Paper
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