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dc.contributor.author정지원-
dc.contributor.author주병권-
dc.contributor.author최우범-
dc.contributor.author이덕중-
dc.contributor.author최두진-
dc.contributor.author오명환-
dc.date.accessioned2015-12-02T05:45:07Z-
dc.date.available2015-12-02T05:45:07Z-
dc.date.issued199802-
dc.identifier.citation, 207-208-
dc.identifier.other8988-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/18950-
dc.publisher제5회 한국반도체학술대회 논문집-
dc.subjectMEMS-
dc.title실리콘과 유리접합을 이용한 FED Packaging-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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