The effect of oxygen partial pressure during cooling on lead zirconate titanate thin film growth by using rf magnetron sputtering method

Title
The effect of oxygen partial pressure during cooling on lead zirconate titanate thin film growth by using rf magnetron sputtering method
Authors
김동주김태송이전국정형진
Keywords
PZT
Issue Date
1998-12
Publisher
Journal of materials research
Citation
VOL 13, NO 12, 3442-3448
URI
http://pubs.kist.re.kr/handle/201004/18988
ISSN
0884-2914
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE