A basic study for the microbolometer using VOx thin films

Title
A basic study for the microbolometer using VOx thin films
Authors
문성욱김민철강호관윤영수서상희김도훈오명환
Keywords
MEMS; 비냉각적외선센서; Vanadium Oxide
Issue Date
1998-11
Publisher
제 9 회 적외선 영상 센서 Conference
URI
http://pubs.kist.re.kr/handle/201004/18997
Appears in Collections:
KIST Publication > Conference Paper
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