Surface modification of α-Al2O3(0001) by N2+ ion irradiation

Title
Surface modification of α-Al2O3(0001) by N2+ ion irradiation
Authors
최원국최성창정형진고석근변동진금동화
Keywords
surface modification; sapphire surface; reactive ion beam irradiation
Issue Date
1998-11
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 16, NO 6, 3311-3313
URI
http://pubs.kist.re.kr/handle/201004/19003
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE