Surface modification of α-Al2O3(0001) by N2+ ion irradiation
- Surface modification of α-Al2O3(0001) by N2+ ion irradiation
- 최원국; 최성창; 정형진; 고석근; 변동진; 금동화
- surface modification; sapphire surface; reactive ion beam irradiation
- Issue Date
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
- VOL 16, NO 6, 3311-3313
- Appears in Collections:
- KIST Publication > Article
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