Si micromachining for MEMS-IR sensor application

Title
Si micromachining for MEMS-IR sensor application
Authors
박흥우주병권박윤권박정호김철주염상섭서상희오명환
Keywords
field emission; MEMS; wafer direct bonding; orientation dependent etching; PbTiO3(PTO) layer; IR sensor; sol-gel
Issue Date
1998-10
Publisher
TEEM (한국전기전자재료학회)
Citation
VOL 11, NO 10, 815-819
URI
http://pubs.kist.re.kr/handle/201004/19140
ISSN
1229-7607
Appears in Collections:
KIST Publication > Article
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