Structure and gas-sensing characteristics of undoped tin oxide thin films fabricated by ion-assisted deposition

Title
Structure and gas-sensing characteristics of undoped tin oxide thin films fabricated by ion-assisted deposition
Authors
송석균조준식최원국정형진최동수이정용백홍구고석근
Keywords
SnOx; Reactive ion assisted deposition; Grain size; Porosity; Gas sensitivity
Issue Date
1998-01
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 46, NO 1, 42-49
Abstract
Undoped SnOx thin films were deposited by a reactive ion assisted deposition technique at various ion beam potential (VI) onto amorphous SiO2/Si substrates at room temperature. Crystalline structures of the films were investigated in terms of grain size, composition ratio, porosity and peak area percent of adsorbed oxygen. Sensitivities for propane (C3H8), methane (CH4) and hydrogen (H2) gas in SnOx gas sensor devices were characterized at the substrate temperatures of 100-500oC. The gas sensitivities depend on the grain size rather than the porosity. It is also proportioned to the amounts of adsorbed oxygen at room temperature by XPS analysis.
URI
http://pubs.kist.re.kr/handle/201004/19184
ISSN
0925-4005
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KIST Publication > Article
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