RBS/channeling studies on the heteroepitaxially grown Y2O3 film on Si(100)

Title
RBS/channeling studies on the heteroepitaxially grown Y2O3 film on Si(100)
Authors
김효배M.H. ChoS.W. WhangboC.N. WhangS.C. Choi최원국송종한S.O. Kim
Keywords
Double domain structure; Yttrium oxide; Si substrate; Heteroepitaxially grown; Crystalline defects
Issue Date
1988-05
Publisher
Thin solid films
Citation
VOL 320, NO 2, 169-172
Abstract
The heteroepitaxially grown yttrium oxide layer by an ionized cluster beam (ICB) on a Si(100) substrate was investigated by Rutherford backscattering spectrometry (RBS)/channeling. The channeling minimum value (χmin) of the Y2O3 layer on Si(100) is 0.28, and this is the smallest value among those reported. From the channeling polar plots, it is found that Y2O3 film grown on Si(100) oriented with (110) direction and has a double domain structure. The 〈110〉 axis of Y2O3 layer is exactly parallel to the (100) axis of the Si substrate. It is also observed that the interface region of Y2O3 film has more crystalline defects than the surface region.
URI
http://pubs.kist.re.kr/handle/201004/19218
ISSN
0040-6090
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KIST Publication > Article
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