Processing and characterization of a direct bonded SOI using SiO//2 Thin Film

Title
Processing and characterization of a direct bonded SOI using SiO//2 Thin Film
Authors
신동운최두진김긍호
Keywords
SOI(Silicon on Insulator)
Issue Date
1998-01
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 35, NO 6, 535-542
URI
http://pubs.kist.re.kr/handle/201004/19221
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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