Evaluation of elastic properties of DLC films using substrate etching techniques

Title
Evaluation of elastic properties of DLC films using substrate etching techniques
Authors
조성진이광렬은광용한준희고대홍
Keywords
다이아몬드상 카본; 탄성계수; 잔류응력; DLC films; elastic modulus; poisson's ratio; nano-indenataion
Issue Date
1998-01
Publisher
요업학회지; Journal of the Korean Ceramic Society
Citation
VOL 35, NO 8, 813-818
URI
http://pubs.kist.re.kr/handle/201004/19363
Appears in Collections:
KIST Publication > Article
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