Characteristics of 2-inch DLC coated Si FEAs panel

Title
Characteristics of 2-inch DLC coated Si FEAs panel
Authors
이상조주병권강호관문성욱이윤희D. Jeon오명환
Keywords
FED; FEA; DLC coating
Issue Date
1997-09
Publisher
Proc. IDRC '97, Toronto, Canada
Citation
, 374-377
URI
http://pubs.kist.re.kr/handle/201004/19369
Appears in Collections:
KIST Publication > Conference Paper
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