Micromachined semi-encapsulated spiral inductors for micro electro mechanical systems (MEMS) applications

Title
Micromachined semi-encapsulated spiral inductors for micro electro mechanical systems (MEMS) applications
Authors
Daniel J. SadlerWenjin ZhangChong H. Ahn김희중한석희
Keywords
MEMS; spiral inductors
Issue Date
1997-09
Publisher
IEEE transactions on magnetics.
Citation
VOL 33, NO 5, 3319-3321
URI
http://pubs.kist.re.kr/handle/201004/19385
Appears in Collections:
KIST Publication > Article
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