Maskless selective epitaxial growth on patterned GaAs substrates by atmospheric pressure MOCVD

Title
Maskless selective epitaxial growth on patterned GaAs substrates by atmospheric pressure MOCVD
Authors
손창식김성일박영균황성민한철구김용김은규민석기최인훈
Keywords
selective growth
Issue Date
1997-07
Publisher
1997 International microprocesses and nanotechnology conference.
Citation
, 134-135
URI
http://pubs.kist.re.kr/handle/201004/19453
Appears in Collections:
KIST Publication > Conference Paper
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