High resolution single-component resists based on terpolymers having photoacid-generating comphorsulfonyloxymaleimide units

Title
High resolution single-component resists based on terpolymers having photoacid-generating comphorsulfonyloxymaleimide units
Authors
김상태김진백김종만정찬문안광덕
Keywords
photochemical acid generation; terpolymers; camphorsulfnyloxymaleimide; photo-acid generation
Issue Date
1997-06
Publisher
Journal of photopolymer science and technology; [Fotoporimā Konwakai shi]
Citation
VOL 10, NO 3, 489-492
URI
http://pubs.kist.re.kr/handle/201004/19472
ISSN
09149244
Appears in Collections:
KIST Publication > Article
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