마이크로머신 (MEMS) 과 재료기술

Title
마이크로머신 (MEMS) 과 재료기술
Authors
김희중
Keywords
마이크로머신
Issue Date
1997-06
Publisher
서울공대지 .
Citation
VOL 27, 27-29
URI
http://pubs.kist.re.kr/handle/201004/19485
Appears in Collections:
KIST Publication > ETC
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