Laser-induced direct etching of GaAs using chlorofluorocarbon (CFC) alternatives gases

Title
Laser-induced direct etching of GaAs using chlorofluorocarbon (CFC) alternatives gases
Authors
김무성이천박세기최원철김은규김성일민석기안병성
Keywords
Ar ion laser
Issue Date
1997-05
Publisher
Journal of electronic materials
Citation
VOL 26, NO 5, 436-439
URI
http://pubs.kist.re.kr/handle/201004/19517
Appears in Collections:
KIST Publication > Article
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