Characteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition

Title
Characteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition
Authors
김동준김용태박종완
Keywords
W-B-N
Issue Date
1997-04
Publisher
Bulletin of the Korean physical society
Citation
VOL 15, NO 1, 172-172
URI
http://pubs.kist.re.kr/handle/201004/19554
Appears in Collections:
KIST Publication > Conference Paper
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